PRO-75/100 MBE Systems

Professional Top-of-the-Line MBE Systems

Chamber Layout

Three standard versions of the deposition chamber, depending on the application, are available:

  • A deposition chamber with a large top flange, with a cooling shroud and with ports for twelve effusion cells 7 x NW100CF (6“ O.D.) and 5 x NW63CF (4.5“ O.D.)
  • A deposition chamber with a large top flange, with a cooling shroud, with ports for nine effusion cells 5 x NW100CF (6“ O.D.) and 4 x NW63CF (4.5“ O.D.) and one horizontally mounted e-beam evaporator port NW250CF (12“ O.D.)
  • A deposition chamber with a large top flange, with a cooling shroud, with ports for seven effusion cells 4 x NW100CF (6“ O.D.) and 3 x NW63CF (4.5“ O.D.) and two horizontally mounted e-beam evaporator ports NW250CF (12“ O.D.)

A sample preparation and storage chamber with its own pumping system is also available. Due to the modular design of the EVO MBE-System this chamber can be retro-fitted also at a later stage.

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