PRO-75/100 MBE Systems

Professional Top-of-the-Line MBE Systems

Chamber

  • Very large effusion cell capacity from 10 cm3 up to 200 cm3 for layer growth
  • Smaller effusion cell volumes from 1.5 cm3 to 10 cm3 for doping applications
  • EBV, EBVV or EBVM type e-beam evaporators
  • Rotary shutters for the effusion cells
  • Optional linear shutter ports
  • LN2 cooling shroud
  • Further ports on the chamber: viewports for good visibility during sample transfer, two tilted flanges for ellipsometry, flanges for a beam flux monitor, a quartz micro balance, a RGA, for venting, for pressure measurement, for a RHEED electron gun and a flange for a RHEED screen
  • Large pumping port
  • One flange perpendicular to the sample for optical measurements

 

General Design Aspects:

The distance between the source flanges on the cluster flange and the support frame bottom is optimized for very good accessibility to all effusion cells. All shutter blades are operated from soft-acting shutter modules. The increasing/decreasing shutter movement speed follows a sinusoidal speed curve to avoid particles being flinged away by the shutter blades. 

The customer can choose for special effusion cells with user adjustable tradeoff between thickness uniformity and material consumption by using the crucible insert technology.

In addition all sources are usually mounted into water cooling shrouds and therefore reduce the LN2 consumption significantly. Special care has been taken to allow safe operation using interlocks and convenient system control. The bakeout tent ensures homogeneous heat distribution for ultimate vacuum conditions and cleanest environment.  

The system comes completely assembled and fully tested as a turn-key system.

The PRO MBE-Systems can be easily extended with Omicrons Multiprobe analysis systems providing various analysis techniques such as SPM, AFM, XPS, UPS, AES, SEM and many others without compromising the performance.

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Pumping System

The standard pumping configuration for the deposition chamber consistis of an Ion Getter Pump, a Titanium Sublimation Pump and a Turbomolecular Pump with oil-free Roughing Pump. Depending on the application, a cryopumping system can be added for highest pumping speed and ultimate base pressure during the growth process. Higher pumping speeds are available on request, like a larger Turbomolecular Pump or larger Ion Getter Pump.

The standard pumping configuration for the preparation / storage chamber consists of an Ion Getter Pump or a Turbomolecular Pump and a Titanium Sublimation Pump. The standard pumping configuration for the loadlock chamber consists of a by-pass pumping to the main Turbomolecular Pump. An option is a dedicated Turbomolecular Pump with oil-free Roughing Pump for the loadlock chamber.

The pressure measurement for the deposition chamber and for the preparation / storage chamber makes use of an Ion- and Pirani-Gauge while for the loadlock chamber an optional combined Pirani-/Cold Cathode-Gauge is used.

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Sample Manipulator

The sample manipulator for the PRO MBE-Systems accepts substrates with 1“ to 4” in diameter and smaller Omicron standard sample plates (using a suitable adaptor) and is compatible with all Omicron analysis equipment.

  • Movement: z-direction for sample transfer
  • Azimuthal rotation (cont. n*360°) with up to 50 RPM 
  • Substrate shutter

Robust and long-lifetime heaters:

  • tantalum wire heater (RT < T < 1170 K)
  • tungsten wire heater (RT < T < 1270 K)
  • pyrolytic graphite heater (RT < T < 1470 K)
  • optional special purposes heater (e.g. for oxygen environment) using SiC heating element (RT < T < 1370 K) or special materials for compatibility with specific requirements
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