Ultimate ESCA & k-Space Imaging

At a Glance

  • Ultimate Imaging XPS Resolution: 500 nm / 100 nm (Lab / Synchroton)
  • Easy sample navigation by PEEM technology
  • Small spot spectroscopy
  • Aberration Corrected Energy Filter
  • High Power Monochromatic X-Ray Source
  • µARUPS with ultimate angle acceptance
  • Created in co-operation with FOCUS GmbH

Ground-breaking Design

The NanoESCA offers chemical state mapping with unsurpassed XPS lateral resolution (<500 nm achieved under laboratory conditions). The instrument allows analyzing smallest sample structures giving chemical state information beyond the limits of other high lateral resolution techniques such as scanning Auger and TOF SIMS.

Real time sample navigation is ensured by PEEM technique which operates in the secondary electron regime. The PEEM mode allows finding small features easily on a large sample area and provides high resolution (< 50 nm resolution). In addition the PEEM mode provides quantitative information on the very local work function and local sample charging.

The spectroscopy capabilities of the NanoESCA can be completed by the µARUPS option which allows analyzing the k-space from µm-areas e.g. small grains in a polycrystalline surface with ultimate angular acceptance.

For its revolutionary design the NanoESCA received the 2007 R&D 100 award.


Made for imaging

Over the last decades standard XPS instruments (ESCA+) have matured towards routine sample analysis and instrument development is dominated mainly by software integration and ease-of-use.

Approaches towards new instrumentation beyond routine XPS sample analysis have been rare and imaging XPS with lateral resolution below 1µm stayed long out of reach.
The unique approach of a high resolution entrance lens and the revolutionary energy analyzer concept (IDEA = imaging double hemispherical energy analyzer) allowed NanoESCA to breach this barrier. In contrast to standard secondary electron microscopy (SEM) or x-ray beam induced secondary imaging (SXI) high lateral resolution PEEM imaging with excellent energy resolution allows detailed pre-analysis of the sample far beyond pure sample navigation.

As a result much deeper understanding of the local sample structure, chemistry and electronic structure becomes possible with NanoESCA - an instrument truly designed for imaging.