Vertical E-Beam Evaporator

At a Glance

The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).

Vertically oriented compact UHV electron beam evaporator with DN63CF (4.5" OD) mounting flange and 4 cc / 5 cc hearth volume.

  • High purity e-beam evaporation
  • 270° beam deflection 
  • 3 kW power
  • High frequency x-y-beam deflection system