EBVV63

Vertical E-Beam Evaporator

  • Fully UHV compatible construction
  • Small dimension: DN63CF(4.5“ OD) mounting flange
  • Hearth volumes 4 cm3 (5 cm3) with 15° (12°) taper and 15 mm depth
  • Effective water cooling of the hearth
  • Long filament lifetime
  • Easy maintenance
  • 270° beam deflection
  • Acceleration voltage from 4 to 10 kV
  • High frequency x-y-beam deflection system
  • Silicon shielding parts for use in SiGe-MBE
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