High Purity e-beam Evaporator

At a Glance

The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).

Horizontally mounted UHV electron beam evaporator on a DN150CF/ DN200CF/DN250CF (8"/10”/12” OD) mounting flange with 40 cc or 100 cc hearth volume.

  • 270° beam deflection
  • Up to 10kW power
  • Large hearth capacity (up to 100cc)
  • High frequency x-y-beam deflection system