Triple EFM
• Evaporation area Ø 8.5, 11 and 15 mm
• Working distance 93 mm (± 10 mm)
• 3 independent cells/filaments/ flux monitors
• No crosstalk during compound growth
• Rear-loading of evaporants
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EFM-H
• Beam angle: 15° max.
• FWHM: ± 15° to ± 6° (approx.)
• Flange to sample distance: 203 mm or larger
• Insertion depth: 141.5 mm
• Compatible with NGEFM or EVC Series Controllers
• Options: shutter, gas inlet, pumping bypass
• Effective water cooling
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EBVV63
Vertical E-Beam Evaporator featuring:
• High purity e-beam evaporation
• 270° beam deflection
• 3kW power
• High frequency x-y-beam deflection system
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