DECO

Decomposition Sources

  • Typical applications of the DECO phosphorus doping source are high level and sharp delta-doping with phosphorus in Si/SiGe MBE.
  • Small crucible charges, large double layer shutters, integrated water cooling and reduced shielding allow a fast shutdown of the cell after the doping.
  • High 1020/cm3 doping and sharp delta-doping have been reported in literature applying the DECO
  • Single crystal GaP material with a purity >6 N is recommended as source material.
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