Valved Corrosive Cracker Source for Sb, Te, Mg

Controlled Injection of Radicals of Sb, Te, Mg or other Corrosive Materials

  • DN100CF (6” OD) mounting flange (or DN 63CF (4.5” OD with VADP adapter flange)
  • Crucible 420 cm³
  • Heating system with three separate heater-circuits for the cell, the valve and the cracker
  • Three thermocouples Type C for the cell, the valve and the cracker
  • Operating temperature of the cell crucible: 500-550°C
  • Operating temperature of the valve: 600-650°C
  • Operating temperature of the cracker: 900-1000°C
  • Outgassing temperature of the cell crucible: 900°C
  • Outgassing temperature of the valve: 1000°C
  • Outgassing temperature of the cracker: 1300°C
  • Integrated water cooling shroud
  • Bakeout temperature up to 250°C
  • Flux control with integrated all PBN valve unit
  • Valve control either via hand control or by a motor drive with a control unit
Top
Feedback